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Built-in encoder! High-resolution positioning stage
It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by the controller. This is a custom example of a slim model in the direction of travel. Benefits of being slim: - Space-saving with a long stroke - Securing space on the reference plane - Miniaturization of inspection equipment
15–38 µm stroke, 0.1 nm resolution, compact high-speed response piezo stage
P-753 is a one-axis piezo nano positioning stage that controls a travel range of 15 to 38 µm with a resolution of 0.1 nm. By measuring the actual movable part with a two-electrode capacitive sensor and utilizing a frictionless structure with flexure guides, it achieves nanometer-level motion and positioning within a few milliseconds. *For more details, please download the PDF or contact us.*
Fully closed-loop controllable stage with built-in encoder.
It is equipped with an in-house developed optical linear scale encoder, allowing it to operate with a resolution of 100 nm or 50 nm when controlled by a controller. It is a slim model in the direction of movement. Benefits of being slim: - Space-saving with a long stroke - Ensures space for the reference plate - Compact design for inspection equipment
